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Electrical Resistance of W/Si–Ge (0–75 wt % Ge) Contacts

✍ Scribed by K. G. Barbakadze; T. S. Vekua; S. P. Krivoruchko; E. P. Sabo; R. R. Shvangiradze


Book ID
111587017
Publisher
SP MAIK Nauka/Interperiodica
Year
2003
Tongue
English
Weight
113 KB
Volume
39
Category
Article
ISSN
0020-1685

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Contact resistivities for sputtered W/W
✍ Zhang Bangwei; W.A. Jesser; F.D. Rosi 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 972 KB

Using a two-point probe the contact resistivities were studied at 300 K and the effect of heat treatment on them for W/W and W/Ta layers deposited on Si-Ge-GaP alloys. Up to 1000 K for 10 h the contact resistivity for the W/W deposited layers did not change from the value at 300 K. However, the W/Ta