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Electrical properties of shallow implanted layers in silicon

✍ Scribed by Mukashev, B. N. ;Kusainov, Zh. A. ;Nusupov, K. Kh. ;Tokmoldin, S. Zh.

Publisher: John Wiley and Sons
Year: 1983
Tongue: English
Weight: 186 KB
Volume: 78
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2210780146

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