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Nitrogen implanted etch-stop layers in silicon

✍ Scribed by R. Paneva; G. Temmel; E. Burte; H. Ryssel

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 383 KB
Volume: 27
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(94)00155-n

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