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Electrical properties of Al2O3 film deposited at low temperatures

✍ Scribed by W.H. Ha; M.H. Choo; S. Im

Book ID: 117145731
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 286 KB
Volume: 303
Category: Article
ISSN: 0022-3093
DOI: 10.1016/s0022-3093(02)00968-7

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