Electrical, optical and luminescence properties of a-Si/SiN multilayers
β Scribed by P.G. LeComber; W.E. Spear; R.A. Gibson; M. Hopkinson; P.K. Bhat; T.M. Searle; I.G. Austin
- Book ID
- 118333564
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 171 KB
- Volume
- 77-78
- Category
- Article
- ISSN
- 0022-3093
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Visible photoand electroluminesceuce was found at room temperature in two types of nanocomposite layers SiNx(Si). The first type of layers was obtained by annealing a-Si film.g in nitrogen at 900-950Β°C. The second type of layers was obtained by ion-plasma reactive sputtering of a Si target in a nitr
We have found the deposition technology at which the interface roughness of Nb/Si multi/a yer is strongly correlated and decreases with deposited layer number. On the basis of our Nb/Si multilayer we succeeded to prepare ten-fold stacked Josephson junction (JJ). Basic electric properties of stacked