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Electrical properties of a SiC-Si multilayer structure

✍ Scribed by Bozhevol’nov, V. B.; Yafyasov, A. M.; Miailovskii, V. Yu.; Egorova, Yu. V.; Sokolov, A. A.; Filatova, E. O.

Book ID
125394916
Publisher
Springer
Year
2014
Tongue
English
Weight
515 KB
Volume
48
Category
Article
ISSN
1063-7826

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We have found the deposition technology at which the interface roughness of Nb/Si multi/a yer is strongly correlated and decreases with deposited layer number. On the basis of our Nb/Si multilayer we succeeded to prepare ten-fold stacked Josephson junction (JJ). Basic electric properties of stacked