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Electrical conductivity of silicon-on-insulator structures prepared by bonding silicon wafers to a substrate using hydrogen implantation

✍ Scribed by I. V. Antonova; V. F. Stas’; V. P. Popov; V. I. Obodnikov; A. K. Gutakovskii


Book ID
110124702
Publisher
Springer
Year
2000
Tongue
English
Weight
186 KB
Volume
34
Category
Article
ISSN
1063-7826

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