✦ LIBER ✦
X‐ray moiré pattern in dislocation‐free silicon‐on‐insulator wafers prepared by oxygen ion implantation
✍ Scribed by Jiang, B. L.; Shimura, F.; Rozgonyi, G. A.
- Book ID
- 111916045
- Publisher
- American Institute of Physics
- Year
- 1990
- Tongue
- English
- Weight
- 666 KB
- Volume
- 56
- Category
- Article
- ISSN
- 0003-6951
- DOI
- 10.1063/1.102782
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