Estimation of bonded silicon-on-insulator wafers by means of diffractometry using a parallel X-ray microbeam

✍ Scribed by Y. Tsusaka; M. Urakawa; K. Yokoyama; S. Takeda; M. Katou; H. Kurihara; F. Yoshida; K. Watanabe; Y. Kagoshima; J. Matsui

• Book ID: 114166211
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 158 KB
• Volume: 199
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(02)01407-6