✦ LIBER ✦

Electrical conduction in rapidly annealed sputter-deposited SiO2 films (in O2Ar atmosphere) on Si

✍ Scribed by Eftekhari, G.

Book ID: 105384766
Publisher: John Wiley and Sons
Year: 1995
Tongue: English
Weight: 282 KB
Volume: 151
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2211510115

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Strong violet emission from Ge–SiO2 co-s

Strong violet emission from Ge–SiO2 co-sputtered films annealed in O2 atmosphere

✍ J.K Shen; X.L Wu; X.M Bao; R.K Yuan; J.P Zou; C Tan 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 120 KB

Effects of annealing on the characterist

Effects of annealing on the characteristics of ZnO films deposited in various O2/(O2+Ar) ratios

✍ Cui-ping Li; Bao-he Yang; Xi-ming Chen; Xiao-guo Wu 📂 Article 📅 2010 🏛 Tianjin University of Technology 🌐 English ⚖ 360 KB

Effect of annealing temperature on struc

Effect of annealing temperature on structural and electrical properties of tantalum nitride thin film resistors deposited on SiO[sub 2]∕Si substrates by dc sputtering technique

✍ Cuong, Nguyen Duy ;Phuong, Nguyen Mai ;Kim, Dong-Jin ;Kang, Byoung-Don ;Kim, Cha 📂 Article 📅 2006 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 530 KB

Effects of deposition parameters on tant

Effects of deposition parameters on tantalum films deposited by direct current magnetron sputtering in Ar–O2 mixture

✍ Y.M. Zhou; Z. Xie; H.N. Xiao; P.F. Hu; J. He 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 658 KB

Hafnium oxide thin films deposited by hi

Hafnium oxide thin films deposited by high pressure reactive sputtering in atmosphere formed with different Ar/O2 ratios

✍ M. Toledano-Luque; E. San Andrés; J. Olea; A. del Prado; I. Mártil; W. Bohne; J. 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 240 KB

Effects of defects generated in ALD TiO2

Effects of defects generated in ALD TiO2films on electrical properties and interfacial reaction in TiO2/SiO2/Si system upon annealing in vacuum

✍ Sanghee Won; Seunghee Go; Wonhee Lee; Kyunghoon Jeong; Hyunsuk Jung; Chongmu Lee 📂 Article 📅 2008 🏛 TechnoPress 🌐 English ⚖ 445 KB