✦ LIBER ✦
Hafnium oxide thin films deposited by high pressure reactive sputtering in atmosphere formed with different Ar/O2 ratios
✍ Scribed by M. Toledano-Luque; E. San Andrés; J. Olea; A. del Prado; I. Mártil; W. Bohne; J. Röhrich; E. Strub
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 240 KB
- Volume
- 9
- Category
- Article
- ISSN
- 1369-8001
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