A high density of double stacking faults consisting of six Si-C bilayers in cubic stacking sequence could be observed in 4H-SiC crystals with nitrogen doping concentrations exceeding 2 Γ 10 19 cm Γ3 after annealing at temperatures above 1100 1C. The double stacking faults form by glide of two partia
Electrical and Optical Properties of Stacking Faults in 4H-SiC Devices
β Scribed by Bin Chen; Jun Chen; Takashi Sekiguchi; Takasumi Ohyanagi; Hirofumi Matsuhata; Akimasa Kinoshita; Hajime Okumura
- Book ID
- 107455856
- Publisher
- Springer US
- Year
- 2010
- Tongue
- English
- Weight
- 388 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0361-5235
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## Abstract We report the results of a cathodoluminescence (CL) investigation performed on asβgrown stacking faults in a thick, undoped, 4HβSiC epitaxial layer grown by CVD. To investigate the size and optical signature of the defects we used, first, roomβtemperature (RTCL) and then lowβtemperature
The optical properties of major in-grown stacking faults (IGSFs) in 4H-SiC epilayers have been characterized by micro-photoluminescence (micro-PL) spectroscopy and its intensity mapping. Strong PL emissions from the IGSFs are observed even at room temperature. Three kinds of IGSFs have been identifi