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Electrical and mechanical properties of MgO thin films on GaAs

✍ Scribed by R Soto; S Mergui; P.E Schmidt

Book ID
114086205
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
87 KB
Volume
308-309
Category
Article
ISSN
0040-6090

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A-oriented GaAs substrates by flash evaporation in the substrate temperature range Tsub = 570 ... 870 K. Epitaxialgrowth begins at Tsub = 645 K. The films had always the chalcopyrite structure. Indications to a transition from the chalcopyrite phase to the sphalerite phase were observed at Tsub = 87