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Electric force microscopy as a probe of active and passive elements of integrated circuits

✍ Scribed by Ilya Karpov; Richard W. Belcher; Jack H. Linn

Book ID: 108418572
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 497 KB
Volume: 125
Category: Article
ISSN: 0169-4332
DOI: 10.1016/s0169-4332(97)00456-x

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