✦ LIBER ✦
A new bifunctional topography and current probe for scanning force microscope testing of integrated circuits
✍ Scribed by S. Bae; K. Schiemann; W. Mertin; E. Kubalek; M. Maywald
- Book ID
- 108362446
- Publisher
- Elsevier Science
- Year
- 1999
- Tongue
- English
- Weight
- 618 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0026-2714
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