✦ LIBER ✦
Characterization of atomic force microscopy and electrical probing techniques for IC metrology: Toledo-Crow, R.; Vaez-Iravani M.; Smith, B. W.; Summa, J. R. SPIE - Integrated Circuit Methology, Inspection, and Process Control VII; 1993 Mar 2; San Jose, CA. Bellingham, WA; International Society for Optical Engineering; 1993. 357-68
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 128 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0141-6359
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