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Efficient nitrogen incorporation into amorphous carbon films by double beam method

โœ Scribed by Hayashi, Yasuhiko; Kamio, T.; Soga, T.; Kaneko, K.; Jimbo, T.


Book ID
122516716
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
179 KB
Volume
14
Category
Article
ISSN
0925-9635

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