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Effects of thermal treatment on the properties of ZnO films deposited on MgO-buffered Si substrates

โœ Scribed by S.J Chen; Y.C Liu; J.G Ma; Y.M Lu; J.Y Zhang; D.Z Shen; X.W Fan


Book ID
108341931
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
182 KB
Volume
254
Category
Article
ISSN
0022-0248

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Al-doped ZnO (ZnO:Al) thin films were deposited on Si substrates using the radio-frequency reactive magnetron sputtering technique. Effect of Al contents and annealing treatments on the structural and photoluminescence (PL) properties of ZnO films was investigated. The results showed that crystallin