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Effects of superimposed pulse bias on TiN coating in cathodic arc deposition

✍ Scribed by Li Zhengyang; Zhu Wubiao; Zhang Yong; Li Guiying; Cao Eryan

Book ID: 108422756
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 186 KB
Volume: 131
Category: Article
ISSN: 0257-8972
DOI: 10.1016/s0257-8972(00)00754-4

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