✦ LIBER ✦
Properties of TiN hard coatings prepared by unbalanced magnetron sputtering and cathodic arc deposition using a uni- and bipolar pulsed bias voltage
✍ Scribed by M. Griepentrog; B. Mackrodt; G. Mark; T. Linz
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 508 KB
- Volume
- 74-75
- Category
- Article
- ISSN
- 0257-8972
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