Improved control of TiN coating properties using cathodic arc evaporation with a pulsed bias

✍ Scribed by W. Olbrich; J. Fessmann; G. Kampschulte; J. Ebberink

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 499 KB
• Volume: 49
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/0257-8972(91)90065-5