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Effects of process parameters on the ionization in triode ion plating

✍ Scribed by K. Salmenoja; J.M. Molarius; A.S. Korhonen

Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 416 KB
Volume: 155
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(87)90460-3

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