Effects of process parameters on the ionization in triode ion plating: K Salmenoja et al, Thin Solid Films, 155, 1987, 143–150

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 160 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90390-4