✦ LIBER ✦
The use of optical emission spectroscopy for process control in triode ion plating with ZrN
✍ Scribed by K Salmenoja; AS Korhonen
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 278 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0042-207X
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