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Effects of Potential and Mechanical Stimulation on Oxidation of Tantalum During Electrochemical Mechanical Polishing

✍ Scribed by F. Gao; Hong Liang

Book ID: 107457421
Publisher: Springer US
Year: 2011
Tongue: English
Weight: 499 KB
Volume: 41
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-011-1832-5

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