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Effects of package on the performance of MEMS piezoresistive accelerometers

โœ Scribed by Ping Li, Shiqiao Gao, Haipeng Liu, Jun Liu, Yunbo Shi

Book ID
120914876
Publisher
Springer-Verlag
Year
2012
Tongue
English
Weight
565 KB
Volume
19
Category
Article
ISSN
0946-7076

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In this paper, we present a detailed study and analysis of piezoresistive effects on a membrane suspended in air based sensor. The variation of its capacitance under flow of stress or gas is investigated. The developed approach allows us to extract the material parameters in accurate way.