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Modelling and analysis of MEMS sensor based on piezoresistive effects

โœ Scribed by L. Kaabi; A. Kaabi; J. Sakly; F. AbdelMalek

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
231 KB
Volume
27
Category
Article
ISSN
0928-4931

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โœฆ Synopsis

In this paper, we present a detailed study and analysis of piezoresistive effects on a membrane suspended in air based sensor. The variation of its capacitance under flow of stress or gas is investigated. The developed approach allows us to extract the material parameters in accurate way.

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