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Design, fabrication and characterization of high performance SOI MEMS piezoresistive accelerometers

✍ Scribed by Roy, Anindya Lal; Bhattacharyya, Tarun Kanti


Book ID
121625626
Publisher
Springer-Verlag
Year
2013
Tongue
English
Weight
937 KB
Volume
21
Category
Article
ISSN
0946-7076

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