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Design optimization of a high performance silicon MEMS piezoresistive pressure sensor for biomedical applications

✍ Scribed by Pramanik, C; Saha, H; Gangopadhyay, U

Book ID: 120025617
Publisher: Institute of Physics
Year: 2006
Tongue: English
Weight: 154 KB
Volume: 16
Category: Article
ISSN: 0960-1317
DOI: 10.1088/0960-1317/16/10/019

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