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Design & Fabrication of a MEMS Piezoresistive Accelerometer with Beam-Film Combined Structure

✍ Scribed by Liu, Yan; Zhao, Yu Long; Sun, Lu

Book ID: 120677620
Publisher: Trans Tech Publications Inc.
Year: 2010
Tongue: English
Weight: 296 KB
Volume: 44-47
Category: Article
ISSN: 1660-9336
DOI: 10.4028/www.scientific.net/AMM.44-47.1305

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