Fabrication of a MEMS capacitive accelerometer with symmetrical double-sided serpentine beam-mass structure

✍ Scribed by Zhou, Xiaofeng; Che, Lufeng; Lin, Youling; Li, Xiaolin; Wu, Jian; Wang, Yuelin

• Book ID: 121621276
• Publisher: Springer-Verlag
• Year: 2013
• Tongue: English
• Weight: 835 KB
• Volume: 20
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-013-1911-z