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MEMSlab: A Practical MEMS Course for the Fabrication, Packaging, and Testing of a Single-Axis Accelerometer

✍ Scribed by Grundbacher, R.; Hoetzel, J.E.; Hierold, C.

Book ID: 114616401
Publisher: IEEE
Year: 2009
Tongue: English
Weight: 764 KB
Volume: 52
Category: Article
ISSN: 0018-9359
DOI: 10.1109/te.2008.919807

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✍ RUSSELL, A. 📂 Article 📅 1917 🏛 Nature Publishing Group 🌐 English ⚖ 331 KB