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Effects of methane flow rate on the optical properties and chemical bonding of germanium carbon films deposited by reactive sputtering

โœ Scribed by Che, Xing-Sen; Liu, Zheng-Tang; Li, Yang-Ping; Wang, Ning; Xu, Zuo


Book ID
121365103
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
638 KB
Volume
90
Category
Article
ISSN
0042-207X

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