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Effects of radio frequency power on the chemical bonding, optical and mechanical properties for radio frequency reactive sputtered germanium carbide films

✍ Scribed by Hu, C Q; Xu, L; Tian, H W; Jin, Z S; Lv, X Y; Zheng, W T

Book ID: 125501253
Publisher: Institute of Physics
Year: 2006
Tongue: English
Weight: 201 KB
Volume: 39
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/39/23/026

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