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Effects of ion irradiation on the mechanical properties of SiNawOxCyHz sol–gel derived thin films

✍ Scribed by D.A. Lucca; Y. Qi; T.A. Harriman; T. Prenzel; Y.Q. Wang; M. Nastasi; J. Dong; A. Mehner

Book ID
108224750
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
463 KB
Volume
268
Category
Article
ISSN
0168-583X

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Effects of ion implantation on the surfa
Effects of ion implantation on the surface mechanical properties of sol–gel derived TEOS/MTES thin films
✍ D.A. Lucca; R. Ghisleni; M. Nastasi; L. Shao; Y.Q. Wang; J. Dong; A. Mehner 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 287 KB

A study of the effects of ion implantation of hybrid organic/inorganic modified silicate thin films on their surface mechanical properties is presented. The thin films were synthesized by sol-gel processing from tetraethylorthosilicate (TEOS) and methyltriethoxysilane (MTES) precursors and spin-coat