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Effects of ion irradiation on the structural transformation of sol-gel derived TEOS/MTES thin films

✍ Scribed by D.A. Lucca; R. Ghisleni; J.-K. Lee; Y.Q. Wang; M. Nastasi; J. Dong; A. Mehner

Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 285 KB
Volume: 266
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2008.03.022

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