Effects of ion implantation on the surface mechanical properties of sol–gel derived TEOS/MTES thin films

✍ Scribed by D.A. Lucca; R. Ghisleni; M. Nastasi; L. Shao; Y.Q. Wang; J. Dong; A. Mehner

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 287 KB
• Volume: 257
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2007.01.062

✦ Synopsis

A study of the effects of ion implantation of hybrid organic/inorganic modified silicate thin films on their surface mechanical properties is presented. The thin films were synthesized by sol-gel processing from tetraethylorthosilicate (TEOS) and methyltriethoxysilane (MTES) precursors and spin-coated onto Si substrates. After heat treatment at 300 °C for 10 min, the films were implanted with 100 keV Si + , O + and N + with fluences ranging from 1 • 10 14 to 3 • 10 16 ions/cm 2 . Both hardness and reduced elastic modulus were seen to exhibit a monotonic increase with fluence for 100 keV Si + implanted films. When implanted with different ions having the same fluence and similar electronic stopping, no observable differences in the hardness and reduced elastic modulus depth profiles could be seen.