Effects of ion implantation on the surfa
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D.A. Lucca; R. Ghisleni; M. Nastasi; L. Shao; Y.Q. Wang; J. Dong; A. Mehner
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Article
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2007
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Elsevier Science
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English
⚖ 287 KB
A study of the effects of ion implantation of hybrid organic/inorganic modified silicate thin films on their surface mechanical properties is presented. The thin films were synthesized by sol-gel processing from tetraethylorthosilicate (TEOS) and methyltriethoxysilane (MTES) precursors and spin-coat