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Effects of ion bombardment on microcrystalline silicon growth by inductively coupled plasma assistant magnetron sputtering

✍ Scribed by YangYang He, YuanJun Su, Ming Zhu…

Book ID: 120800259
Publisher: Science in China Press (SCP)
Year: 2012
Tongue: English
Weight: 641 KB
Volume: 55
Category: Article
ISSN: 1672-1799
DOI: 10.1007/s11433-012-4858-7

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