✦ LIBER ✦
The effect of substrate temperature on the growth of CNx films with β-C3N4-like microcrystallites by an inductively coupled plasma (ICP) sputtering method
✍ Scribed by Hsu, Chia-Yuan; Hong, Frankin Chau-Nan
- Book ID
- 122693573
- Publisher
- Elsevier Science
- Year
- 1999
- Tongue
- English
- Weight
- 523 KB
- Volume
- 8
- Category
- Article
- ISSN
- 0925-9635
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