Metallic sputtering growth of crystalline titanium oxide films on unheated glass substrate using inductively coupled plasma assisted direct current magnetron sputtering

✍ Scribed by Z.G. Li; S. Miyake; M. Makino; Y.X. Wu

• Book ID: 108290206
• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 382 KB
• Volume: 517
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2008.08.128