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Effects of hydrogen on the morphology and electrical properties of GaN grown by plasma-assisted molecular-beam epitaxy

โœ Scribed by Dong, Y.; Feenstra, R. M.; Greve, D. W.; Moore, J. C.; Sievert, M. D.; Baski, A. A.


Book ID
126891454
Publisher
American Institute of Physics
Year
2005
Tongue
English
Weight
447 KB
Volume
86
Category
Article
ISSN
0003-6951

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Electrical properties of GaN grown on a-
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a-Plane GaN templates were grown on r-plane sapphire substrate by metalorganic vapor phase epitaxy (MOVPE) and then undoped a-plane GaN layers were grown at different growth temperatures on the a-plane GaN templates by plasma-assisted molecular beam epitaxy (PA-MBE). In order to investigate the effe