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Effects of Hydrogen in Working Gas on Valence States of Oxygen in Sputter-Deposited Indium Tin Oxide Thin Films

✍ Scribed by Luo, Suning; Kohiki, Shigemi; Okada, Koichi; Kohno, Atsushi; Tajiri, Takayuki; Arai, Masao; Ishii, Satoshi; Sekiba, Daiichiro; Mitome, Masanori; Shoji, Fumiya

Book ID
125519666
Publisher
American Chemical Society
Year
2010
Tongue
English
Weight
689 KB
Volume
2
Category
Article
ISSN
1944-8244

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Hydrogen effects on crystallinity, photo
Hydrogen effects on crystallinity, photoluminescence, and magnetization of indium tin oxide thin films sputter-deposited on glass substrate without heat treatment
✍ Luo, Suning ;Kohiki, Shigemi ;Okada, Koichi ;Shoji, Fumiya ;Shishido, Toetsu πŸ“‚ Article πŸ“… 2010 πŸ› John Wiley and Sons 🌐 English βš– 384 KB

## Abstract Indium tin oxide (ITO) thin films were sputter deposited by using working gas containing hydrogen on glass substrate without any heat treatments. The films demonstrated X‐ray diffraction due to polycrystalline ITO, blue‐green photoluminescence (PL) due to oxygen defects in nano‐structur