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Effect of heat treatment on the NO 2 -sensing properties of sputter-deposited indium tin oxide thin films

✍ Scribed by Vijayalakshmi, K.; Pillay, Vasanthi V.


Book ID
126530103
Publisher
Taylor and Francis Group
Year
2011
Tongue
English
Weight
523 KB
Volume
91
Category
Article
ISSN
0950-0839

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## Abstract Indium tin oxide (ITO) thin films were sputter deposited by using working gas containing hydrogen on glass substrate without any heat treatments. The films demonstrated X‐ray diffraction due to polycrystalline ITO, blue‐green photoluminescence (PL) due to oxygen defects in nano‐structur