Hydrogen effects on crystallinity, photo
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Luo, Suning ;Kohiki, Shigemi ;Okada, Koichi ;Shoji, Fumiya ;Shishido, Toetsu
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Article
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2010
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John Wiley and Sons
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English
β 384 KB
## Abstract Indium tin oxide (ITO) thin films were sputter deposited by using working gas containing hydrogen on glass substrate without any heat treatments. The films demonstrated Xβray diffraction due to polycrystalline ITO, blueβgreen photoluminescence (PL) due to oxygen defects in nanoβstructur