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Production of amorphous tin oxide thin films and microstructural transformation induced by heat treatment

✍ Scribed by Z.W. Chen; J.K.L. Lai; C.H. Shek; H.D. Chen


Publisher
Springer
Year
2005
Tongue
English
Weight
583 KB
Volume
81
Category
Article
ISSN
1432-0630

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## Abstract Indium tin oxide (ITO) thin films were sputter deposited by using working gas containing hydrogen on glass substrate without any heat treatments. The films demonstrated X‐ray diffraction due to polycrystalline ITO, blue‐green photoluminescence (PL) due to oxygen defects in nano‐structur