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Effect of post-deposition heat-treatment on physical properties of tin oxide thin films prepared by an electron-beam evaporation technique

✍ Scribed by S. M. Rozati; S. Mirzapour; M. G. Takwale; B. R. Marathe; V. G. Bhide

Publisher
Springer
Year
1993
Tongue
English
Weight
220 KB
Volume
12
Category
Article
ISSN
0261-8028

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## Abstract Indium tin oxide (ITO) thin films have been deposited onto glass substrates at room temperature by ion beam assisted deposition technique at different deposition rates (0.1–0.3 nm/s). The effects of the deposition rate on the structural, optical and electrical properties of the deposite