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Optical and electrical properties of indium tin oxide thin films sputter-deposited in working gas containing hydrogen without heat treatments

✍ Scribed by Suning Luo; Koichi Okada; Shigemi Kohiki; Fuki Tsutsui; Hirokazu Shimooka; Fumiya Shoji

Book ID
113792601
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
298 KB
Volume
63
Category
Article
ISSN
0167-577X

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Hydrogen effects on crystallinity, photo
Hydrogen effects on crystallinity, photoluminescence, and magnetization of indium tin oxide thin films sputter-deposited on glass substrate without heat treatment
✍ Luo, Suning ;Kohiki, Shigemi ;Okada, Koichi ;Shoji, Fumiya ;Shishido, Toetsu πŸ“‚ Article πŸ“… 2010 πŸ› John Wiley and Sons 🌐 English βš– 384 KB

## Abstract Indium tin oxide (ITO) thin films were sputter deposited by using working gas containing hydrogen on glass substrate without any heat treatments. The films demonstrated X‐ray diffraction due to polycrystalline ITO, blue‐green photoluminescence (PL) due to oxygen defects in nano‐structur