✦ LIBER ✦

Effects of hydrogen dilution on deposition process of nano-crystalline silicon film by SiCl 4 /H 2 plasma

✍ Scribed by Wang, Zhaokui; Lou, Yanhui; Lin, Kuixun; Lin, Xuanying; Huang, Rui; Wei, Junhong

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

R.f. plasma deposition of amorphous sili

✍ Giovanni Bruno; Pio Capezzuto; Francesco Cramarossa; Riccardo D'Agostino 📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 230 KB

Effect of hydrogen dilution on the optic

✍ Yamaguchi, Masaaki; Morigaki, Kazuo 📂 Article 📅 2003 🏛 Taylor and Francis Group 🌐 English ⚖ 598 KB

Effect of methane/hydrogen dilution on t

✍ Serra, C.; Pascual, E.; Maass, F.; Bertran, E.; Esteve, J. 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 327 KB

Optical and mass spectroscopy measuremen

✍ Zhou, Haiyang; Watanabe, Jun; Miyake, Masato; Ogino, Akihisa; Nagatsu, Masaaki; 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 290 KB

The influence of hydrogen dilution ratio

✍ Hae-Yeol Kim; Ki-Young Lee; Jai-Young Lee 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 589 KB

Effect of Gas Sources on the Deposition

✍ Weng, Jun; Xiong, Liwei; Wang, Jianhua; Man, Weidong; Chen, Guanhu 📂 Article 📅 2010 🏛 IOP Publishing 🌐 English ⚖ 210 KB