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Effects of electrodes on performance figures of thin film bulk acoustic resonators

✍ Scribed by Zhang, Tao; Zhang, Hui; Wang, Zuo-qing; Zhang, Shu-yi

Book ID
120729509
Publisher
American Institute of Physics
Year
2007
Tongue
English
Weight
550 KB
Volume
122
Category
Article
ISSN
0001-4966

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## Abstract On‐wafer parameter extraction in thin‐film bulk acoustic wave resonator (FBAR) embedded on its substrate is performed. The extraction algorithm implements a multistep least‐squares optimization strategy, obtaining the equivalent‐circuit parameters of both FBAR and its substrate from exp